Products

With over 150 systems shipped worldwide, the Savannah family is the standard for ALD research and development. The Savannah combines ease of use and great experimental flexibility into a compact, inexpensive package. The Savannah family of systems is the perfect place to start if you are looking for an affordable, reliable ALD research system.

If your needs are more advanced and you require even more experimental flexibility, then the Fiji is the system to fit your needs. The Fiji is modular and can be customized to fit your particular needs. It comes with a plasma generator to enable plasma-enhanced ALD and can be configured for cleanroom compatibility and comes with an optional loadlock.

If you have production ALD needs, then the Phoenix system is the right choice. The Phoenix is a batch ALD tool capable of holding a large number of substrates at one time. Its unique chamber design assures accurate films from batch to batch and shortens maintenance time to under one hour

If you have unique thin film applications, please consult our team of ALD experts. We will work with you to customize a solution that fits your needs.