Customer Papers
This is a searchable database of papers written by our customers, using Cambridge NanoTech systems. If you are publishing a paper based on research done on a Cambridge NanoTech ALD system, please contact us. We would be pleased to include it in our database.Showing customer papers 1-10 of 12 Next
| LINK | Cao, Q.; Xia, M. G.; Shim, M.; Rogers, J. A. |
| "Bilayer organic-inorganic gate dielectrics for high-performance, low-voltage, single-walled carbon nanotube thin-film transistors, complementary logic gates, and p-n diodes on plastic substrates" | |
| Advanced Functional Materials, 2006, 16, 2355-2362 | |
| Abstract: | High-capacitance bilayer dielectrics based on atomic-layer-deposited HfO2 and spin-cast epoxy are used with networks of single-walled carbon nanotubes (SWNTs) to enable low-voltage, hysteresis-free, and high-performance thin-film transistors (TFTs) on silicon and flexible plastic substrates. These HfO2-epoxy dielectrics exhibit excellent properties including mechanical flexibility, large capacitance (up to ca. 330 nF cm(-2)), and low leakage current (ca. 10(-8) A cm(-2)); their low-temperature (ca. 150 degrees C) deposition makes them compatible with a range of plastic substrates. Analysis and measurements of these dielectrics as gate insulators in SWNT TFTs illustrate several attractive characteristics for this application. Their compatibility with polymers used for charge-transfer doping of SWNTs is also demonstrated through the fabrication of n-channel SWNT TFTs, low-voltage p-n diodes, and complementary logic gates. |
| Address: | Cao, Q Univ Illinois, Beckman Inst, Dept Mat Sci |
| LINK | Jia, H. P.; Gross, E. K.; Wallace, R. M.; Gnade, B. E. |
| "Patterning effects on poly (3-hexylthiophene) organic thin film transistors using photolithographic processes" | |
| Organic Electronics, 2007, 8, 44-50 | |
| Abstract: | We explore the effects of conventional photo lithographic patterning of the active layer of poly (3-hexylthiophene) (P3HT) organic thin film transistors (OTFT) on device performance. The performance of the devices was monitored in each step of the patterning process. We successfully developed a patterning process which is compatible with plastic substrates and P3HT as the organic semiconductor. In this process, parylene and atomic layer deposition (ALD) Al2O3 were used as capping layers. Al2O3 and parylene/P3HT were etched using Al etchant and O-2 plasma reactive ion etching (RIE), respectively. The degradation occurred primarily during the ALD Al2O3 deposition and capping layer etching. There was a 30% degradation in mobility, a 1-2x reduction in drive current, and an increase in threshold voltage after the ALD Al2O3 deposition. In the capping layer etching, a near 50% degradation in mobility was observed. The patterned devices have a mobility of 0.02 cm(2)/V s, which is 1000x better than photo lithographically patterned P3HT OTFTs previously reported in the literature, and comparable to un-patterned P3HT devices. (C) 2006 Elsevier B.V. All rights reserved. |
| Address: | Gnade, BE Univ Texas, POB 830688,EC 33, Richardson, TX 75083 USA Univ Texas, POB 830688,EC 33, Richardson, TX 75083 USA Univ Texas, Richardson, TX 75083 USA |
| LINK | Knez, M.; Kadri, A.; Wege, C.; Gosele, U.; Jeske, H.; Nielsch, K. |
| "Atomic layer deposition on biological macromolecules: Metal oxide coating of tobacco mosaic virus and ferritin" | |
| Nano Letters, 2006, 6, 1172-1177 | |
| Abstract: | Decoration of nanoparticles, in particular biomolecules, gathered high attention in recent years.(1-7) Of special interest is the potential use of biomolecules as templates for the fabrication of semiconducting or metallic nanostructures.(1-7,26) In this work we show the application of atomic layer deposition, a gas-phase thin film deposition process, to biological macromolecules, which are frequently used as templates in nanoscale science, and the possibility to fabricate metal oxide nanotubes and thin films with embedded biomolecules(1-13). |
| Address: | Knez, M Max Planck Inst Microstruct Phys, Weinberg 2, D-06120 Halle, Germany Max Planck Inst Microstruct Phys, Weinberg 2, D-06120 Halle, Germany Max Planck Inst Microstruct Phys, D-06120 Halle, Germany Univ Stuttgart, Dept Mol Biol |
| LINK | Fanciulli, Marco; Costa, Omar; Baldovino, Silvia; Cocco, Simone; Seguini, Gabriele; Prati, Enrico; Scarel, Giovanna |
| "DEFECTS AT THE HIGH-κ /SEMICONDUCTOR INTERFACES INVESTIGATED BY SPIN DEPENDENT SPECTROSCOPIES" | |
| , 2006, 263-276 | |
| Abstract: | The interfaces between high-κ dielectrics, grown by atomic layer deposition, and semiconductors have been characterized using various electrically detected magnetic resonance spectroscopy techniques. The dominant center at the interface was found to be Pb0-like. Microwave contactless photoconductive resonance and defect-assisted spin dependent tunneling spectroscopies, performed at low temperatures, reveal also a signal which could be related to E’-like near interfacial oxide traps. |
| Address: | Laboratorio Nazionale MDM-INFM, Via C. Olivetti 2, Agrate Brianza, 20041, Italy |
| LINK | J.A. Sulpizio; Z.Z. Bandic; D. Goldhaber-Gordon |
| "Nanofabrication of top-gated carbon nanotube-based transistors: Probing electron-electron interactions in one-dimensional systems" | |
| , 2006, 21, 2916-2921 | |
| Abstract: | Carbon nanotubes are interesting for studying the remarkable electronic properties of one-dimensional (1D) quantum systems. Electron flow in such systems is not described by Fermi liquid theory-restricted dimensionality leads to the appearance of collective excitations-or Luttinger liquid behavior. Previous studies have probed Luttinger liquid behavior by tunneling into or between one-dimensional systems. We propose to extend these studies by using narrow top gates to introduce tunable tunnel barriers within nanotubes. We report on the scalable fabrication of carbon nanotube-based transistors with nanowire top gates. We have used electron-beam lithography (EBL) to create single-walled carbon nanotube (SWNT) transistors with source-drain spacings down to 200 nm and with sub-30 nm metal top gates for creating tunable tunnel barriers. The top metal gate is isolated from the nanotube by a thin aluminum oxide layer deposited by atomic layer deposition. We fabricated chips with 100 devices using multiple electron-beam lithography alignment steps and achieved overall placement better than 30 nm. The details of top-gated SWNT transistor fabrication are presented, and initial transport measurements on fabricated devices are discussed. |
| Address: | Department of Physics, Stanford University, Stanford, California 94305 Hitachi San Jose Research Center, San Jose, California 95120 |
| LINK | Knez, M.; Kadri, A.; Wege, C.; Gosele, U.; Jeske, H.; Nielsch, K. |
| "Atomic Layer Deposition on Biological Macromolecules: Metal Oxide Coating of Tobacco Mosaic Virus and Ferritin" | |
| Nano Lett., 2006, 6, 1172-1177 | |
| Abstract: | Abstract: Decoration of nanoparticles, in particular biomolecules, gathered high attention in recent years.1-7 Of special interest is the potential use of biomolecules as templates for the fabrication of semiconducting or metallic nanostructures.1-7,26 In this work we show the application of atomic layer deposition, a gas-phase thin film deposition process, to biological macromolecules, which are frequently used as templates in nanoscale science, and the possibility to fabricate metal oxide nanotubes and thin films with embedded biomolecules.1-13 |
| Address: | Max-Planck-Institute of Mikrostructure Physics, Weinberg 2, D-06120 Halle, Germany, and Department of Molecular Biology and Plant Virology, University of Stuttgart, Pfaffenwaldring 57, D-70550 Stuttgart, Germany |
| LINK | Jin fan, Hong; Knez, Mato; Scholz, Roland; Nielsch, Kornelius; Pippel, Eckhard; Hesse, Dietrich; Zacharias, Margit; Gosele, Ulrich |
| "Monocrystalline spinel nanotube fabrication based on the Kirkendall effect" | |
| Nature Materials, 2006, 5, 627-631 | |
| Abstract: | There is a deep interest in methods to fabricate hollow nanocrystals for potential application as high-efficiency catalysts or drug-delivery agents. Tubular one-dimensional nanocrystals have been prepared for a wide variety of materials, including semiconductors1, 2, metals3, 4, ferroelectrics5, 6 and magnetite7. They can be produced by rolling up layered materials or via an axial growth in a rolled-up form8, 9, 10, coating pores in templates11 or by eliminating the core of a core-shell nanowire1, 7. The Kirkendall effect, a classical phenomenon in metallurgy12, was recently applied to explain the formation of hollow spherical nanocrystals13, 14, 15, 16, 17. Although the experimental demonstration and theoretical treatment mainly concern binary compounds and planar interfaces or nanoscale spherical interfaces, the fabrication route provided by the Kirkendall effect should be generic, and should also work for high-aspect-ratio hollow cylinders (that is, nanotubes) or even more complex superstructures. In this letter, we report, for the first time, on ultra-long single-crystal ZnAl2O4 spinel nanotubes (total diameter: approx40 nm, wall thickness: approx10 nm) fabricated through a spinel-forming interfacial solid-state reaction of core-shell ZnO-Al2O3 nanowires involving the Kirkendall effect. Our results simultaneously represent an extension of applying the Kirkendall effect in fabricating hollow nano-objects from zero-dimensional to multidimensional, and from binary to ternary systems. |
| Address: | Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle, Germany |
| LINK | Huang, J.Y.; Wang, X.D.; Wang, Z.L. |
| "Controlled Replication of Butterfly Wings for Achieving Tunable Photonic Properties" | |
| Nano Lett., 2006, 6, 2325-2331 | |
| Abstract: | Abstract: The fine structure of the wing scale of a Morpho Peleides butterfly was examined carefully, and the entire configuration was completely replicated by a uniform Al2O3 coating through a low-temperature ALD process. An inverted structure was achieved by removing the butterfly wing template at high temperature, forming a polycrystalline Al2O3 shell structure with precisely controlled thickness. Other than the copy of the morphology of the structure, the optical property, such as the existence of PBG, was also inherited by the alumina replica. Reflection peaks at the violet/blue range were detected on both original wings and their replica, while a simple alumina coating shifted the reflection peak to longer wavelength because of the change of periodicity and refraction index. The alumina replicas also exhibited similar functional structures as waveguide and beam splitter, which may be used as the building blocks for photonic ICs with high reproducibility and lower fabrication cost compared to traditional lithography techniques. |
| Address: | School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245, and State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, P. R. China |
| "Single-crystalline MgAl2O4 spinel nanotubes using a reactive and removable MgO nanowire template" | |
| Nanotechnology, 2006, 17, 5157-5162 | |
| Abstract: | Using MgO nanowires as a reactive template, we fabricated for the first time single-crystal MgAl2O4 spinel nanotubes through an interfacial solid-state reaction of MgO-Al2O3 core-shell nanowires. Single-crystal MgO nanowires are coated with a conformal thin layer of amorphous Al2O3 via atomic layer deposition. Subsequent annealing at 700 |
| Address: | 1 Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany 2 Forschungszentrum Rossendorf, 01314 Dresden, Germany |
| LINK | Dhindsa, M.S.; Smith, N.R.; Heikenfeld, J.; Rack, P.D.; Fowlkes, J.D.; Doktycz, M.J.; Melechko, A.V.; Simpson, M.L. |
| "Reversible Electrowetting of Vertically Aligned Superhydrophobic Carbon Nanofibers" | |
| Langmuir, 2006, 22, 9030-9034 | |
| Abstract: | Abstract: Reversible electrostatically induced wetting (electrowetting) of vertically aligned superhydrophobic carbon nanofibers has been investigated. Carbon nanofibers on a 5 × 5 m pitch were grown on Si substrates, electrically insulated with a conformal dielectric, and hydrophobized with fluoropolymer. This nanostructured scaffold exhibited superhydrophobic behavior for saline ( 160). Electrowetting induced a contact angle reduction to 100. Competitive two-liquid (dodecane/saline) electrowetting exhibited reversibility on the same nanostructured scaffold. Without applied bias, ultra-fine-point tip (~25 nm radius) nanofibers result in effectively zero capacitance with the overlying saline layer. Complete electrowetting of the substrate is confirmed as capacitance values increase by several orders of magnitude with increased wetting. These results demonstrate the applicability of reversible electrowetting on nanostructured scaffolds and use of nanofabricated structures that can be integrated with various micro- and nanoelectronic technologies. |
| Address: | Molecular-Scale Engineering and Nanoscale Technologies Group, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 |
Showing customer papers 1-10 of 12 Next