About

Founded in 2003, Cambridge NanoTech grew directly out one of the foremost ALD research groups in the world – the Gordon Lab at Harvard University. With over 150 systems shipped for research and development, Cambridge NanoTech is the leading ALD supplier to academic and industrial institutions worldwide.

With our production ALD and plasma-enhanced ALD systems we continue to expand our product offerings to meet all of our customers’ needs. Our Savannah family of systems has been so successful we have shipped more than 100 of them worldwide and they have been used to produce more than 100 peer reviewed papers. We followed this success with the introduction of the Phoenix production ALD system. Phoenix systems have been up and running in the United States and Asia since March of 2008. Most recently we have introduced the Fiji system in the fall of 2008.

If you are interested in our innovative ALD products, please check here for a distributor in your region or contact Jill. Please check our News and Events section to see if we are appearing at a conference near you.